Product Profile of Silicon Micromachined Capacitive Sensors

Teknic is the manufacturer of Silicon Micromachined Capacitive Sensors. Teknic is an ISO 9001: 2000 certified company. The Silicon Micromachined Capacitive Sensors is designed with capacitive sensors. The small dimensions, rugged construction and excellent reliability makes it especially suitable for unattended free-field instruments and instrumentation of structures, such as nuclear power plants, dams and seismic alerting systems.

Specifications of Silicon Micromachined Capacitive Sensors are:

• Offset [at 0g] 2.5 V ± 200 ?V/ degree C

• Cross axis sensitivity 0.030 V/g

• Hysteresis none

• Noise typ. 10 ?V/?Hz

• Orientation triaxial, horizontal [floor] mounting or vertical [wall] mounting

• Non-Linearity less than 0.5 percent of full scale

• Frequency response linear 0 to 150 Hz [accuracy ±1percent]

• Dynamic range [RMS] > 84 dB [DC to 50 Hz]

• Shock survival 6000 g [0.5 ms half sine]

• Vibration survival 20 g RMS [random noise 20-500 Hz, 30 minutes]

• Operating temperature - 30 to 70 degree C