Compact uv laser machine is designed to deliver hundreds of millijoules of pulse energy with high pulse to pulse stability and excellent beam uniformity. The uv laser machine is a compact, easy to integrate excimer laser with single phase supply. The uv laser machine works on maximum repetition rates from 10 hz to 100 hz, with maximum pulse energies up to 750 mj. Compact uv laser machine is suitable for demanding applications such as pulsed laser deposition [pld], wafer debonding, laser lift-off [llo], solid sampling [la-icp-ms], wire stripping, and fbg writing.