Oil Free Vacuum STP Pump has the feature of low vibration, good reliability and is maintenance free. The Pump has the feature of auto tuning, self diagnostic functions and has DC motor drive. The Pump is designed with bladed rotors. The Pump is used in diffusion, photo resist stripping, crystal/ epitaxial growth, wafer inspection and load lock chambers. The Pump has battery free operation and is offered in compact design. The Pump has half rack controller and eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. The Oil Free Vacuum STP Pump has dry lubricated axial and radial mechanical bearings as safety backup bearings.
