Chamber Exhaust Pressure Controller ensures precise flow rate control of fluids. The Pressure Controller is fitted with high-resolution stepper motor and butterfly valve to ensure a fast, high-resolution response. Chamber Exhaust Pressure Controller can maintain a consistent pressure, at a pressure set by the user, in the chamber. The Pressure Controller is ideal for diffusion or heat oxidation processing, for vertical furnaces, especially phosphor diffusion. Chamber Exhaust Pressure Controller can also be used for pyrogen oxidation as well as spin coater or developer processing.
Applications of Chamber Exhaust Pressure Controller:
