Single Skid Compact Coating Platform is configured around coating zone of 150 X 300 mm diameter range. The Compact Coating Platform is surrounded by two 5” X 15” rectangular cathodes as well as two 6” diameter circular cathodes. The Compact Coating Platform is available in single skid design for complete plug and play operation and fast installation. Single Skid Compact Coating Platform operates on pulsed DC bias power supply with facility for ion etching and substrate bias/ etc.
