Product Profile of Compact Magnetron Sputtering Cathodes
Compact Magnetron Sputtering Cathodes are fitted with high strength rare earth magnet module which allows sputtering of permeable materials up to 3 mm thickness. Magnetron Sputtering Cathodes are available with integrated argon gas inlet assembly and can perform under low pressure range. Magnetron Sputtering Cathodes are available in compact design with integrated shutter assembly which facilitates ease of installation.
Compact Magnetron Sputtering Cathodes ensure optimized turbulent water flow to provide uniform target cooling.
Key Features of Compact Magnetron Sputtering Cathodes
- Compact and easy to install design with integrated shutter assembly
- High strength rare earth magnet module allows sputtering of permeable materials up to 3 mm thickness
- High sputtering rate coupled with excellent target utilization
- Integrated argon gas inlet assembly
- Optimized turbulent water flow to provide uniform target cooling
- Low operating pressures
- Flexibility to accept target in clamp on or bonded configuration to cover broad range of thicknesses down to foils
- External or internal mounting (optional)
