Product Profile of Automatic Chemical Process Line

Automatic Chemical Process Line is suitable for all types of batch type machines with MMI for wafer processing activity in semi conductor, MEMS and solar PV wafer processing Industry. The Chemical Process Line is provided with Ultrasonic unit for cleaning bath and laminar flow hood for clean room. The Chemical Process Line Automatic Chemical Process Line comes with polyvinylidene fluoride or Teflon tanks for all critical chemistry baths.

Key Features of Automatic Chemical Process Line

• Polyvinylidene fluoride or Teflon tanks for all critical chemistry baths
• Laminar flow hood suitable for clean room
• Ultrasonic unit for cleaning bath
• Virgin based Quartz, (Boron free) process vessel for photo resist stripping bath
• Number of process tanks as per customer requirement and process
• Tanks can be easily added for expansion
• Stainless steel 316 Grade sink will be provided for general purpose cleaning