Product Profile of Multi-process Dry Pumps
The Alcatel Vacuum Technology India manufactures Multi-process Dry Pumps [ADP/ADS Series Two]. Alcatel Vacuum Technology India has been awarded with ISO 9001 and 14001 Certification.
Multi-process Dry Pumps [ADP/ADS Series Two] covers a large range of vacuum requirements with 4 models which can be chosen from:
- LM versions for clean applications
- P versions for light/medium applications
- H version for harsh applications
Multi-process Dry Pumps [ADP/ADS Series Two] is used by the manufacturers from the Semiconductor industry and it allows them to reduce unscheduled downtime, reduce overall running cost and increase profitability.
The Salient Features of Multi-process Dry Pumps [ADP/ADS Series Two] are:
High reliability to process
- Wide inter-stage channels are able to accommodate large quantities of powder and particles.
- High operating temperature with a precise closed-loop temperature management system, and a linear increase of gas temperature from inlet to outlet.
- Vertical pumping on each stage which prevents particulate accumulation in the swept volume.
Semiconductor fab rules compliant
- Compact: the series 2 model is only 390 mm wide.
- Clean: Alcatel technology is a frictionless and oil-free pump mechanism. There is no risk of particulate contamination.
- Quiet: All models include an integrated silencer, eliminating the need for an additional external silencer.
- Semi S2 compliant.
Low cost of ownership
- Low power consumption at working pressures and at Ultimate Pressure.
- With moderate heat generation, series 2 water consumption is extremely low.
- Nitrogen Purge level is easily set by the customer. Pumps for clean applications do not require any purge.
