Product Profile of Atomic Layer Deposition Valves

Atomic Layer Deposition Valves are featured with normally closed and normally open pneumatic actuation. These Deposition Valves are designed with fully contained pure grade PFA seat which offers broad range of chemical compatibility and excellent resistance to swelling and contamination. These Deposition Valves are featured with fully swept flow path that minimizes entrapment areas, Facilitates purging and Maximizes flow capacity. Atomic Layer Deposition Valves are equipped with standard and thermal actuators to facilitate ease of operation.

Key Features of Atomic Layer Deposition Valves

• Normally closed and normally open pneumatic actuation.
• Standard and thermal actuators
• Capable of valve opening or closing time of less than 5 ms
• Seat flow adjusting mechanism for precise, consistent Cv
• Fully contained pure grade PFA seat offers broad range of chemical compatibility and excellent resistance to swelling and contamination
• Fully swept flow path minimizes entrapment areas, Facilitates purging and Maximizes flow capacity