The magput series sputtering system is provided by torr international. This sputtering system is a flexible planar magnetron sputtering system designed specifically for the r&d and prototype production. Following are some of the technical features of this sputtering system which include:standard table top low-priced magnetron sputtering system can be used for diverse applications from specimen preparation for sem`s to r&d with metal, dielectric and polymer films to custom built multi target sophisticated system for special applications. This sytem is also applied in a deposition process for applications like multi layer optical coatings, sensor devices, solar cells, fuel cells, thin film research, superconductor research, asics, mfms, magnetic devices, biomedical research and cv dot mapping etc. The magsput series system is easily reconfigured for applications requiring a different series of deposited materials, as targets can be changed quickly,. The system process wafers up to 12? diameter and accommodates odd sized substrates. The labview based software brings a state of art `user friendly` comp control to the table top sputtering realm. The e beam evaporation system is completely customizable and the deposition chamber can be designed to accept additional evaporation sources later. To produce uniform adherent thin films of many materials, system provides excellent film quality. Thickness obtained could be from few angstroms to few microns thick.
